Micropositioning Actuator, Stages, Hexapods
  PI offers a large range of high-precision MicroPositioning devices and systems for OEM and research. Our expertise spans from classical motorized actuators to the unique Hybrid Long-Travel, High-Load Translation Stage with Nanometer Precision, PiezoWalk(r) linear motors to 6-Axis Hexapod parallel kinematics micropositioning systems.  All linear and rotary positioners can be arranged to multiaxis combinations and many can be fitted with optional piezo drives with <1 nm resolution.

>>Download the Precision Linear Actuator Catalog

>>Download the Miniature Linear Stage Catalog

Examples
 M-235 Precision Linear Actuator (Models M-230, M-231, M-232, .....)
  • Ultra Compact
  • 50 nm minimum incremental motion (7 nm design resolution)
  • Non rotating tip, ball screws, high load, high speed versions
HTML-Catalog Links
M-230 (10, 25 mm, non rotating tip),
M-232 Compact Mike 
M-235 HD Ball Screw 		 PDF Files:
M-230 (10, 25 mm, non rotating tip),
M-232 Compact Mike 
M-235 HD Ball Screw 
 Roddrive Linear Motor Drive (Model M-674)
  • Travel Ranges to 150 mm
  • Push/Pull Forces to 7 N
  • Velocity to 450 mm/s
HTML-Catalog Links
M-674		 PDF Files:
M-674




 Compact NEXACT® OEM Piezo Stepping Drives (Model N-310)
  • 20 mm Standard Travel Range
  • Compact and Cost-Effective Design
  • To 10 N Push/Pull Force
HTML-Catalog Links
N-310		 PDF Files:
N-310


 NEXLINE® OEM Piezo Nanopositioning Stepping Drives (Model N-214, N-215 / N-111 (below))
  • 20 mm Travel Range
  • 0.03 nm Resolution Open-Loop and 5 nm Closed-Loop
  • To 400 N Push / Pull Force and 600 N Holding Force
HTML-Catalog Links
N-214/215
N-111
  • 5 mm Travel
  • To 50 N Pull / Push Force
  • 80 N Holding Force
 PDF Files:
N-214/215
N-111








 Cost-Effective Stepper-Mike Linear Actuator with Limit Switches (Models M-228 / M-229)
  • Travel Range to 10 mm or 25 mm
  • Max. Velocity 1.5 mm/s
  • Compact Design
HTML-Catalog Links
M-228
M-229		 PDF Files:
M-228
M-229

 Fast Miniature Linear Translation Stage with Integrated Optical Linear Encoder (Model M-122)
  • Travel Range 25 mm
  • Min. Incremental Motion to 0.2 µm
  • Max. Velocity 20 mm/s
HTML-Catalog Links
M-122		 PDF Files:
M-122
 Translation Stages with Ultrasonic Piezomotor and Integrated Linear Encoder (Model M-663)
  • Travel Range 19 mm
  • Smallest Translation Stage with Closed-Loop Linear Motor and Encoder
  • Max. Velocity 400 mm/s
HTML-Catalog Links
M-663		 PDF Files:
M-663
 Low-Profile High-Speed PILine® Translation Stage with Linearencoder (Model M-664)
  • Travel Range 25 mm
  • Max. Velocity 400 mm/s
  • Piezo Linear Motor with 6 N Drive Force
HTML-Catalog Links
M-664		 PDF Files:
M-664
 Compact Closed-Loop Translation Stage with High-Force Piezomotor Drive (Models M-682)
  • Integration of the Powerful PILine® RodDrive
  • Max. Velocity 350 mm/s
  • Up to 7 N Pushing Force
HTML-Catalog Links
M-682		 PDF Files:
M-682
 XY Piezo Linear-Motor Stage (Models M-686)
  • Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
  • Travel Ranges 25 x 25 mm
  • Compatible with PI Piezo Nanopositioning / Scanning Stages
HTML-Catalog Links
M-686		 PDF Files:
M-686
 Micro-Translation Stages (Models M-110 / M-111 / M-112)
  • Ultra Compact
  • 50 nm minimum incremental motion (7 nm design resolution)
  • X, XY and XYZ Combinations
HTML-Catalog Links
M-110/111		 PDF Files:
M-110/111
Hybrid Long-Travel, High-Load Translation Stage with Nanometer Precision
  • Simultaneous Control of Piezo-Flexure Drives & DC-Servo/Ballscrew Drives 
  • 2 nm Linear Encoder Resolution
  • Millisecond Settling Time to Nanometer Precision 
HTML-Catalog Links
M-511.HD Hybrid Stage		 PDF Files:
M-511.HD Hybrid Stage

M-500 Translation Stages with Linear Encoders and ActiveDriveTM
  • 100 to 300 mm  (12 inch) Versions
  • Low Profile, Recirculating Bearings & Ball Screws 
  • Integrated Servo-Amplifier 
  • Optional Linear Encoders (Direct Output Metrology) 
  • Elevator Stage for Compact XYZ Combinations
HTML-Catalog Links
M-500 Translation Stage
M-501 Elevator Stage		 PDF Files:
M-500 Translation Stage
M-500 Elevator Stage





Rotation Stages with ActiveDriveTM
  • Low Profile, High Precision
  • Integrated Servo-Amplifier 
  • Interated Hall-Effect Home Switch
HTML-Catalog Links
Rotation Stages		 PDF Files:
Rotation Stages
M-605 Series Translation Stages with Linear Encoders and ActiveDriveTM
  • 50 and 25 mm Versions, 
  • Integrated Linear Encoder (Direct Output Metrology) 
  • Very Compact, Low Profile, Recirculating Bearings & Ball Screws 
  • Integrated Servo-Amplifier 
HTML-Catalog Links
M-605 Precision Translation Stage		 PDF Files:
M-605 Precision Translation Stage


Ultra-Low Inertia Hexapod MicroPositioning Systems
(6 Degree of Freedom Parallel-Kinematics) 

PI is the leading manufacturer of Hexapods for Optics Alignment, Micro-Machining, Handling, Photonics Alignment Engines, Medical Robots and other ultra-precise applications, with more than 10 years of experience, a great variety of standard and custom designs and hundreds of units in the field.
Advantages of Hexapod Parallel Kinematics over "Stacked" multi-axis designs:

  • Smaller Package Size
  • Higher Stiffness
  • Reduced Position Error Accumulation
  • Better Dynamic Behavior
  • Reduced Runout Errors
  • More Precise Multi-axis Motion
  • NO MOVING CABLES!


More About Hexapods
F130 Hybrid Photonics Alignment System


M-313.80 Micro-XYZ Translation Stages with PiezoMike Drives.		 Hybrid NanoPositioning Systems 

Hybrid Positioning Systems combine the advantages of ultra-low inertia, high-speed PZT NanoPositioning systems and the long travel range of classical micropositoining stages. For high-speed scanning only a very small mass needs to be moved resultion in much better response. 

Advantages are: 

  • Low Inertia
  • Fast Response
  • Sub-Nanometer Resolution 
  • Low Cost
  • Upgradeable Design (Motors, Piezos Drives)
Click here for the Micropositioning Selection Guide.
Talk to one of our PI Application Engineers for your custom or standard solution at:

508-832-3456 (EAST)
949-679-9191 (WEST)

or see our Online Catalog or PDF Catalog for specifications and other PI positioning products.


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