Capacitive Position Sensors
The PI Capacitance Sensors can measure ranges
up to 1000 µm with up to 10 picometer resolution. Special electronics developed
by PI improve the performance of previously available capacitance sensors
by using the Integrated Linearization system (ILS) that provides superior
linearity. Features include:
catalog for specifications and other PI positioning products.
Highest resolution (<0.01 nm) of commercially
available displacement sensors.
Measuring ranges to 1000 µm
Extremely high long term stability (<0.1
nm / 3 hours).
- Up to 10 kHz bandwidth
- Invar versions for highest temperature stability
(5 X 10-6 / °K)
Stand-alone and modular electronics
Standard electronics for position servo control
with PI piezo actuators/systems.