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PI offers the largest selection of research- and industrial-reliability Piezo Actuators, Translators (linear
actuators), Piezo Nano-Positioning Sytems and Piezo Steering Mirrors (Active Optics) worldwide. We have more than 30
years experience.
The PI piezoelectrically driven EDM (Electric Discharge Machining) cut flexure stages offer displacement ranges of
5 to 1000µm (rotation to several mrad) and limit out plane motion to sub-nm/sub-arcsecond deviation/tilt. Some of the
our flexure stages can be fitted with our capacitive sensors which provide resolution and repeatability better than 1 nm.
Features of the PI flexure stages include:
- Single and Multi-Axis Systems up to 6 Degrees of Freedom
- Single Module Parallel-Kinematic Multi-Axis Systems with Large Aperture
- Ultra-Fast Response
- Advanced Control Techniques for Fastest Possible Settling
- Optional Integrated Position Feedback for Closed-Loop Operation and Non-Linearity Compensation
- Step or Continuous Operation: Step Response in Low Millisecond Range
- Optional Integrated Capacitive Displacement Sensors with <1 nm Accuracy
- OEM and Custom Designs
Download Paper on State-of-the-Art Nano-Positioning Technology
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