PI offers the largest selection
of research- and industrial-reliability Piezo Actuators, Translators (linear
actuators), Piezo NanoPositioning Sytems and Piezo Steering Mirrors (Active
Optics) worldwide. We have more than 30 years experience.
The PI piezoelectrically driven EDM (Electric
Discharge Machining) cut flexure stages offer displacement ranges of 5
to 800µm (rotation to several mrad) and limit out plane motion to
sub-nm/sub-arcsecond deviation/tilt. Some of the our flexure stages can
be fitted with our capacitive sensors which provide resolution and repeatability
better than 1 nm. Features of the PI flexure stages include:
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Single and multi-axis systems up to 6 degrees
of freedom.
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Single Module Parallel-Kinematic multi-axis
systems with large aperture.
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Ultra-fast response
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Advanced Control Techniques for fastest possible
settling
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Optional integrated position feedback for
closed loop operation and non-linearity compensation.
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Step or continuous operation: step response
in low millisecond range.
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Optional integrated capacitive displacement
sensors with <1 nm accuracy.
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OEM and custom designs.
Download Paper on State-of-the-Art NanoPositioning Technology
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